EBSD analysis at the EM LAB

The main purpose of this site is to help you quickly to get familiar with EBSD analysis at the EM Lab. The Hitachi LV SEM is using the INCA EBSD and the Hitachi FEG SEM and Zeiss LV FEG SEM are using the TSL EBSDs.

EBSD optimized condition: HT at 20 kV (to keep the Kikuchi bands wide enough for indexing), WD at 20 mm (the best collection angle for the EBSD detector) and the SEM dynamical focus ON.

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This help site includes the following sections,

• 2014 Basic

EBSD configurations at the EM Lab, Phase Identification Limitation

• One of our EBSD application example

• EBSD sample preparation & our experiences

• Comparison between the TSL and INCA EBSDs

• EBSD operation and attention

• TSL EBSD data collection

• TSL EBSD data analysis

• A presentation for theTSL system from the TSL Utah

• INCA EBSD resources

• Simple principle p?norsk

• SEMs short operation procedures for Zeiss, Hitachi LV and FEG, and NorDiff camerausing guide

• More info at the directory list