Complete auto-tuning started at: 27.09.2006 14:17:10 Microscope magnification: 300000x Exposure time (sec): 0.050 Binning: 4 Image size (pixels): 256 x 256 Automatic rotation alignment started at: 27.09.2006 14:17:11 Start microscope calibration at 300 kx. Start focus calibration. 16-bit DAC range Max DAC change = ± 32767 Searching for optimal tilt: Induced tilt: 0.29 mrad Image shift: 16.00 pixels Induced tilt: 0.59 mrad Image shift: 5.23 pixels Induced beam tilt: 1.0 mrad Tilt (X): Image shift = (-5.02,3.28) pixels Tilt (Y): Image shift = (14.86,14.28) pixels Without induced change in focus or astigmatism: Image shift (x-tilt) = 5.99036 pixels Finding proper DAC value for induced focus change. Tilt (X): Image shift = (-13.32,34.21) pixels Image shift (induced focus change) = 36.7107 pixels Induced focus change (DAC) = -100 Tilt (Y): Image shift = (-14.14,15.29) pixels Focus calibration = 22.1864 nm/DAC. Focus calibration is complete. Finding proper DAC value for induced astigmatism change. Tilt (X): Image shift = (6.02,14.13) pixels Image shift (induced astigmatism change) = 15.3618 pixels Tilt (X): Image shift = (-3.18,47.10) pixels Image shift (induced astigmatism change) = 47.2076 pixels Induced stigmator (x) change (DAC) = -1067.07 Tilt (Y): Image shift = (12.22,6.14) pixels x-stigmator calibration = 2.30427 nm/DAC x-stigmator calibration is complete. Tilt (X): Image shift = (-13.08,36.24) pixels Tilt (Y): Image shift = (50.28,7.11) pixels y-stigmator calibration = 4.21434 nm/DAC Average stigmator strength = 3.2593 nm/DAC y-stigmator calibration is complete. Induced defocus: -1000.0 nm Image shift = (18.02,-30.75) pixels Microscope adjustments: Tilt: (4.36 ± 0.00,1.51 ± 0.00) mrad Automatic rotation alignment finished at: 27.09.2006 14:17:55 Automatic stigmating started at: 27.09.2006 14:17:55 Induced beam tilt: 1.0 mrad Tilt (X): Image shift = (-22.32,0.21) pixels Tilt (Y): Image shift = (20.72,-25.81) pixels Microscope adjustments: Defocus: 200 ± 0 nm Astigmatism: (-2091 ± 0,2779 ± 0) nm Automatic stigmating finished at: 27.09.2006 14:18:04 Complete auto-tuning finished at: 27.09.2006 14:18:04